Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6714279 | Lithographic projection apparatus, device manufacturing method and device manufactured thereby | Vadim Yevgenyevich Banine | 2004-03-30 |
| 6683936 | EUV-transparent interface structure | — | 2004-01-27 |