Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6833581 | Structure and method for preventing process-induced UV radiation damage in a memory cell | Angela T. Hui, Minh Van Ngo, Ning Cheng, Jaeyong Park, Jean Y. Yang +1 more | 2004-12-21 |
| 6818141 | Application of the CVD bilayer ARC as a hard mask for definition of the subresolution trench features between polysilicon wordlines | Marina V. Plat | 2004-11-16 |
| 6720133 | Memory manufacturing process using disposable ARC for wordline formation | Mark T. Ramsbey, Tazrien Kamal, Jean Y. Yang, Emmanuil H. Lingunis, Hidehiko Shiraiwa | 2004-04-13 |
| 6673524 | Attenuating extreme ultraviolet (EUV) phase-shifting mask fabrication method | Bruno M. LaFontaine, Bhanwar Singh | 2004-01-06 |