Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6806007 | EUV mask which facilitates electro-static chucking | Amr Y. Abdo | 2004-10-19 |
| 6696847 | Photo assisted electrical linewidth measurement method and apparatus | Jongwook Kye, Harry J. Levinson | 2004-02-24 |
| 6673524 | Attenuating extreme ultraviolet (EUV) phase-shifting mask fabrication method | Kouros Ghandehari, Bhanwar Singh | 2004-01-06 |