Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6740566 | Ultra-thin resist shallow trench process using high selectivity nitride etch | Christopher F. Lyons, Scott A. Bell, Khanh B. Nguyen, Fei Wang, Chih-Yuh Yang | 2004-05-25 |
| 6716571 | Selective photoresist hardening to facilitate lateral trimming | Calvin T. Gabriel, Uzodinma Okoroanyanwu | 2004-04-06 |
| 6710853 | Phase grating focus monitor using overlay technique | Bruno La Fontaine, Jongwook Kye | 2004-03-23 |
| 6696847 | Photo assisted electrical linewidth measurement method and apparatus | Bruno M. LaFontaine, Jongwook Kye | 2004-02-24 |