Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6740566 | Ultra-thin resist shallow trench process using high selectivity nitride etch | Christopher F. Lyons, Scott A. Bell, Harry J. Levinson, Fei Wang, Chih-Yuh Yang | 2004-05-25 |