Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6831451 | Method for adjusting a Weibull slope for variations in temperature and bias voltage | Hyeon-Seag Kim | 2004-12-14 |
| 6829040 | Lithography contrast enhancement technique by varying focus with wavelength modulation | Ivan Lalovic, Christopher F. Lyons, Ramkumar Subramanian | 2004-12-07 |
| 6784992 | Polarization measurement device and method | Alden Acheta | 2004-08-31 |
| 6710853 | Phase grating focus monitor using overlay technique | Bruno La Fontaine, Harry J. Levinson | 2004-03-23 |
| 6696847 | Photo assisted electrical linewidth measurement method and apparatus | Bruno M. LaFontaine, Harry J. Levinson | 2004-02-24 |