Issued Patents 2004
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815359 | Process for improving the etch stability of ultra-thin photoresist | Calvin T. Gabriel | 2004-11-09 |
| 6803178 | Two mask photoresist exposure pattern for dense and isolated regions | Ramkumar Subramanian, Scott A. Bell, Todd P. Lukanc, Marina V. Plat, Hung-Eli Kim | 2004-10-12 |
| 6787458 | Polymer memory device formed in via opening | Nicholas H. Tripsas, Matthew S. Buynoski, Suzette K. Pangrle, Angela T. Hui, Christopher F. Lyons +7 more | 2004-09-07 |
| 6774365 | SEM inspection and analysis of patterned photoresist features | Bhanwar Singh, Alden Acheta | 2004-08-10 |
| 6767693 | Materials and methods for sub-lithographic patterning of contact, via, and trench structures in integrated circuit devices | — | 2004-07-27 |
| 6764808 | Self-aligned pattern formation using wavelenghts | Armando C. Bottelli | 2004-07-20 |
| 6753247 | Method(s) facilitating formation of memory cell(s) and patterned conductive | Suzette K. Pangrle, Matthew S. Buynoski, Nicholas H. Tripsas, Mark S. Chang, Ramkumar Subramanian +1 more | 2004-06-22 |
| 6716571 | Selective photoresist hardening to facilitate lateral trimming | Calvin T. Gabriel, Harry J. Levinson | 2004-04-06 |