Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6822291 | Optimized gate implants for reducing dopant effects during gate etching | Tammy Zheng, Emmanuel de Muizon, Linda Leard | 2004-11-23 |
| 6815359 | Process for improving the etch stability of ultra-thin photoresist | Uzodinma Okoroanyanwu | 2004-11-09 |
| 6811956 | Line edge roughness reduction by plasma treatment before etch | — | 2004-11-02 |
| 6794294 | Etch process that resists notching at electrode bottom | Tammy Zheng | 2004-09-21 |
| 6716571 | Selective photoresist hardening to facilitate lateral trimming | Harry J. Levinson, Uzodinma Okoroanyanwu | 2004-04-06 |
| 6713382 | Vapor treatment for repairing damage of low-k dielectric | Suzette K. Pangrle, Ecran Adem, Lynne A. Okada | 2004-03-30 |