Issued Patents 2004
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6818360 | Quartz mask crack monitor system for reticle by acoustic and/or laser scatterometry | Khoi A. Phan, Bhanwar Singh | 2004-11-16 |
| 6819427 | Apparatus of monitoring and optimizing the development of a photoresist material | Ramkumar Subramanian, Michael K. Templeton | 2004-11-16 |
| 6813574 | Topographically aligned layers and method for adjusting the relative alignment of layers and apparatus therefor | Sanjay K. Yedur, Bhanwar Singh, Ramkumar Subramanian | 2004-11-02 |
| 6809793 | System and method to monitor reticle heating | Khoi A. Phan, Bhanwar Singh, Ramkumar Subramanian | 2004-10-26 |
| 6808591 | Model based metal overetch control | Khoi A. Phan, Christopher F. Lyons, Steven C. Avanzino, Ramkumar Subramanian, Bhanwar Singh +1 more | 2004-10-26 |
| 6793765 | Situ monitoring of microloading using scatterometry with variable pitch gratings | Catherine B. Labelle, Bhanwar Singh | 2004-09-21 |
| 6790790 | High modulus filler for low k materials | Christopher F. Lyons | 2004-09-14 |
| 6784446 | Reticle defect printability verification by resist latent image comparison | Khoi A. Phan, Bhanwar Singh | 2004-08-31 |
| 6778268 | System and method for process monitoring of polysilicon etch | Bhanwar Singh, Michael K. Templeton | 2004-08-17 |
| 6774989 | Interlayer dielectric void detection | Michael K. Templeton, Arvind Halliyal, Bhanwar Singh | 2004-08-10 |
| 6771356 | Scatterometry of grating structures to monitor wafer stress | Christopher F. Lyons, Bhanwar Singh, Steven C. Avanzino, Khoi A. Phan, Ramkumar Subramanian +1 more | 2004-08-03 |
| 6771374 | Scatterometry based measurements of a rotating substrate | Bhanwar Singh, Michael K. Templeton, Ramkumar Subramanian | 2004-08-03 |
| 6762133 | System and method for control of hardmask etch to prevent pattern collapse of ultra-thin resists | Ramkumar Subramanian, Khoi A. Phan | 2004-07-13 |
| 6758612 | System and method for developer endpoint detection by reflectometry or scatterometry | Cyrus E. Tabery, Bhanwar Singh, Ramkumar Subramanian | 2004-07-06 |
| 6746822 | Use of surface coupling agent to improve adhesion | Michael K. Templeton, Bhanwar Singh | 2004-06-08 |
| 6741445 | Method and system to monitor and control electro-static discharge | Khoi A. Phan, Bhanwar Singh, Ramkumar Subramanian | 2004-05-25 |
| 6724476 | Low defect metrology approach on clean track using integrated metrology | Khoi A. Phan, Bhanwar Singh | 2004-04-20 |
| 6702648 | Use of scatterometry/reflectometry to measure thin film delamination during CMP | Steven C. Avanzino, Bhanwar Singh, Ramkumar Subramanian | 2004-03-09 |
| 6704101 | Scatterometry based measurements of a moving substrate | Bhanwar Singh, Ramkumar Subramanian, Michael K. Templeton | 2004-03-09 |
| 6684172 | Sensor to predict void free films using various grating structures and characterize fill performance | Ramkumar Subramanian, Steven C. Avanzino, Christopher F. Lyons, Khoi A. Phan, Bhanwar Singh +1 more | 2004-01-27 |