Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6829380 | Optimization of OPC design factors utilizing an advanced algorithm on a low voltage CD-SEM system | Bryan K. Choo, Bhanwar Singh | 2004-12-07 |
| 6813574 | Topographically aligned layers and method for adjusting the relative alignment of layers and apparatus therefor | Bhanwar Singh, Bharath Rangarajan, Ramkumar Subramanian | 2004-11-02 |