Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6829380 | Optimization of OPC design factors utilizing an advanced algorithm on a low voltage CD-SEM system | Bhanwar Singh, Sanjay K. Yedur | 2004-12-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6829380 | Optimization of OPC design factors utilizing an advanced algorithm on a low voltage CD-SEM system | Bhanwar Singh, Sanjay K. Yedur | 2004-12-07 |