Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6793765 | Situ monitoring of microloading using scatterometry with variable pitch gratings | Bhanwar Singh, Bharath Rangarajan | 2004-09-21 |
| 6746973 | Effect of substrate surface treatment on 193 NM resist processing | Ernesto A. Gallardo, Ramkumar Subramanian, Jacques Bertrand | 2004-06-08 |