Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6746973 | Effect of substrate surface treatment on 193 NM resist processing | Catherine B. Labelle, Ernesto A. Gallardo, Ramkumar Subramanian | 2004-06-08 |
| 6730587 | Titanium barrier for nickel silicidation of a gate electrode | Christy Mei-Chu Woo, Minh Van Ngo, George Jonathan Kluth | 2004-05-04 |
| 6689687 | Two-step process for nickel deposition | George Jonathan Kluth | 2004-02-10 |