Issued Patents 2004
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6834158 | Pinhole defect repair by resist flow | — | 2004-12-21 |
| 6830389 | Parallel plate development with the application of a differential voltage | — | 2004-12-14 |
| 6828162 | System and method for active control of BPSG deposition | Arvind Halliyal, Bhanwar Singh, Ramkumar Subramanian | 2004-12-07 |
| 6819427 | Apparatus of monitoring and optimizing the development of a photoresist material | Ramkumar Subramanian, Bharath Rangarajan | 2004-11-16 |
| 6778268 | System and method for process monitoring of polysilicon etch | Bhanwar Singh, Bharath Rangarajan | 2004-08-17 |
| 6774989 | Interlayer dielectric void detection | Bharath Rangarajan, Arvind Halliyal, Bhanwar Singh | 2004-08-10 |
| 6771374 | Scatterometry based measurements of a rotating substrate | Bharath Rangarajan, Bhanwar Singh, Ramkumar Subramanian | 2004-08-03 |
| 6752899 | Acoustic microbalance for in-situ deposition process monitoring and control | Bhanwar Singh, Arvind Halliyal | 2004-06-22 |
| 6746822 | Use of surface coupling agent to improve adhesion | Bharath Rangarajan, Bhanwar Singh | 2004-06-08 |
| 6727195 | Method and system for decreasing the spaces between wordlines | Mark S. Chang | 2004-04-27 |
| 6704101 | Scatterometry based measurements of a moving substrate | Bharath Rangarajan, Bhanwar Singh, Ramkumar Subramanian | 2004-03-09 |
| 6688784 | Parallel plate development with multiple holes in top plate for control of developer flow and pressure | — | 2004-02-10 |