Issued Patents 2004
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6818360 | Quartz mask crack monitor system for reticle by acoustic and/or laser scatterometry | Bhanwar Singh, Bharath Rangarajan | 2004-11-16 |
| 6809793 | System and method to monitor reticle heating | Bhanwar Singh, Ramkumar Subramanian, Bharath Rangarajan | 2004-10-26 |
| 6808591 | Model based metal overetch control | Bharath Rangarajan, Christopher F. Lyons, Steven C. Avanzino, Ramkumar Subramanian, Bhanwar Singh +1 more | 2004-10-26 |
| 6784446 | Reticle defect printability verification by resist latent image comparison | Bhanwar Singh, Bharath Rangarajan | 2004-08-31 |
| 6771356 | Scatterometry of grating structures to monitor wafer stress | Christopher F. Lyons, Bhanwar Singh, Steven C. Avanzino, Bharath Rangarajan, Ramkumar Subramanian +1 more | 2004-08-03 |
| 6762133 | System and method for control of hardmask etch to prevent pattern collapse of ultra-thin resists | Bharath Rangarajan, Ramkumar Subramanian | 2004-07-13 |
| 6759179 | Methods and systems for controlling resist residue defects at gate layer in a semiconductor device manufacturing process | Jeffrey P. Erhardt, Jerry Cheng, Richard Bartlett, Anthony P. Coniglio, Wolfram Grundke +3 more | 2004-07-06 |
| 6753261 | In-situ chemical composition monitor on wafer during plasma etching for defect control | Arvind Halliyal, Bhanwar Singh | 2004-06-22 |
| 6741445 | Method and system to monitor and control electro-static discharge | Bhanwar Singh, Bharath Rangarajan, Ramkumar Subramanian | 2004-05-25 |
| 6724476 | Low defect metrology approach on clean track using integrated metrology | Bhanwar Singh, Bharath Rangarajan | 2004-04-20 |
| 6684172 | Sensor to predict void free films using various grating structures and characterize fill performance | Ramkumar Subramanian, Steven C. Avanzino, Christopher F. Lyons, Bharath Rangarajan, Bhanwar Singh +1 more | 2004-01-27 |