Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6759179 | Methods and systems for controlling resist residue defects at gate layer in a semiconductor device manufacturing process | Khoi A. Phan, Jeffrey P. Erhardt, Richard Bartlett, Anthony P. Coniglio, Wolfram Grundke +3 more | 2004-07-06 |
| 6756300 | Method for forming dual damascene interconnect structure | Fei Wang, Lynne A. Okada, Minh Quoc Tran, Lu You | 2004-06-29 |