Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664177 | Dielectric ARC scheme to improve photo window in dual damascene process | Kwang-Ming Lin, Chung-Hung Lu, Ya-Li Tai, Kun Liu | 2003-12-16 |
| 6602560 | Method for removing residual fluorine in HDP-CVD chamber | Yi-Lung Cheng, Wen-Kung Cheng, Ming-Hwa Yoo, Ying-Long Wang, Pei-Fen Chou | 2003-08-05 |
| 6585826 | Semiconductor wafer cleaning method to remove residual contamination including metal nitride particles | Yali Tai, Shih-Chi Lin, Wen-Long Lee, Francis Wang, Hsi-Kuei Cheng +1 more | 2003-07-01 |
| 6586347 | Method and structure to improve the reliability of multilayer structures of FSG (F-doped SiO2) dielectric layers and metal layers in semiconductor integrated circuits | Chung-Shi Liu, Hui Wang, Chun-Ching Tsan, Ying-Lang Wang, Tong-Hua Kuan | 2003-07-01 |
| 6573189 | Manufacture method of metal bottom ARC | Shih-Chi Lin, Ming-Hua Yu | 2003-06-03 |