Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664177 | Dielectric ARC scheme to improve photo window in dual damascene process | Kwang-Ming Lin, Chung-Hung Lu, Szu-An Wu, Ya-Li Tai | 2003-12-16 |
| 6602641 | Wafer's zero-layer and alignment mark print without mask when using scanner | — | 2003-08-05 |
| 6602642 | Optical proximity correction verification mask | Chin-Chuan Hsieh, Ching-Ming Chen | 2003-08-05 |