Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6602642 | Optical proximity correction verification mask | Kun Liu, Chin-Chuan Hsieh | 2003-08-05 |
| 6531326 | Method to calibrate the wafer transfer for oxide etcher (with clamp) | Yuh-Da Fan, Pao-Ling Kuo | 2003-03-11 |