Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6602560 | Method for removing residual fluorine in HDP-CVD chamber | Yi-Lung Cheng, Wen-Kung Cheng, Ming-Hwa Yoo, Szu-An Wu, Ying-Long Wang | 2003-08-05 |
PC
Pei-Fen Chou
Overall (2003): #143,102 of 273,478Top 55%
1
Patents 2003