Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6663973 | Low dielectric constant materials prepared from photon or plasma assisted chemical vapor deposition and transport polymerization of selected compounds | Chung-Ju Lee, Giovanni Antonio Foggiato | 2003-12-16 |
| 6586347 | Method and structure to improve the reliability of multilayer structures of FSG (F-doped SiO2) dielectric layers and metal layers in semiconductor integrated circuits | Chung-Shi Liu, Szu-An Wu, Chun-Ching Tsan, Ying-Lang Wang, Tong-Hua Kuan | 2003-07-01 |
| 6534616 | Precursors for making low dielectric constant materials with improved thermal stability | Chung-Ju Lee, Giovanni Antonio Foggiato | 2003-03-18 |