Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6638853 | Method for avoiding photoresist resist residue on semioconductor feature sidewalls | Hung-Wen Sue, Wen-Chin Chiou, Keng-Chu Lin | 2003-10-28 |
| 6586331 | Low sheet resistance of titanium salicide process | Chen-Hua Yu | 2003-07-01 |
| 6586347 | Method and structure to improve the reliability of multilayer structures of FSG (F-doped SiO2) dielectric layers and metal layers in semiconductor integrated circuits | Hui Wang, Szu-An Wu, Chun-Ching Tsan, Ying-Lang Wang, Tong-Hua Kuan | 2003-07-01 |
| 6576551 | Chemical mechanical polish planarizing method with pressure compensating layer | Weng Chang | 2003-06-10 |
| 6562712 | Multi-step planarizing method for forming a patterned thermally extrudable material layer | Chen-Hua Yu | 2003-05-13 |
| 6544882 | Method to improve reliability of multilayer structures of FSG (F-doped SiO2) dielectric layers and aluminum-copper-TiN layers in integrated circuits | Shau-Lin Shue, Chen-Hua Yu | 2003-04-08 |