Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656832 | Plasma treatment method for fabricating microelectronic fabrication having formed therein conductor layer with enhanced electrical properties | Shing-Chyang Pan, Shwangming Jen | 2003-12-02 |
| 6638853 | Method for avoiding photoresist resist residue on semioconductor feature sidewalls | Hung-Wen Sue, Chung-Shi Liu, Wen-Chin Chiou | 2003-10-28 |