Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6584987 | Method for improved cleaning in HDP-CVD process with reduced NF3 usage | Yi-Lung Cheng, Wen-Kung Cheng, Yin-Lang Wang | 2003-07-01 |
| 6586347 | Method and structure to improve the reliability of multilayer structures of FSG (F-doped SiO2) dielectric layers and metal layers in semiconductor integrated circuits | Chung-Shi Liu, Hui Wang, Szu-An Wu, Ying-Lang Wang, Tong-Hua Kuan | 2003-07-01 |