Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6584987 | Method for improved cleaning in HDP-CVD process with reduced NF3 usage | Yi-Lung Cheng, Chun-Ching Tsan, Wen-Kung Cheng | 2003-07-01 |
YW
Yin-Lang Wang
Overall (2003): #87,853 of 273,478Top 35%
1
Patents 2003