Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645356 | Methods and apparatus for processing the surface of a microelectronic workpiece | Daniel J. Woodruff, Kyle M. Hanson, Thomas H. Oberlitner, John M. Pedersen, Vladimir Zila | 2003-11-11 |
| 6638410 | Apparatus and method for electrolytically depositing copper on a semiconductor workpiece | Thomas C. Taylor | 2003-10-28 |
| 6632345 | Apparatus and method for electrolytically depositing a metal on a workpiece | — | 2003-10-14 |
| 6565729 | Method for electrochemically depositing metal on a semiconductor workpiece | Gregory J. Wilson, Paul R. McHugh, Robert A. Weaver, Thomas Ritzdorf | 2003-05-20 |
| 6527925 | Contact assemblies, methods for making contact assemblies, and plating machines with contact assemblies for plating microelectronic workpieces | Robert W. Batz, Jr., John M. Pedersen, John L. Klocke | 2003-03-04 |
| 6508920 | Apparatus for low-temperature annealing of metallization microstructures in the production of a microelectronic device | Thomas Ritzdorf, E. Henry Stevens, Lyndon Graham, Curt Dundas | 2003-01-21 |