Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645356 | Methods and apparatus for processing the surface of a microelectronic workpiece | Daniel J. Woodruff, Kyle M. Hanson, Linlin Chen, John M. Pedersen, Vladimir Zila | 2003-11-11 |
| 6547937 | Microelectronic workpiece processing tool including a processing reactor having a paddle assembly for agitation of a processing fluid proximate to the workpiece | Kyle M. Hanson | 2003-04-15 |