Issued Patents 2003
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6663762 | Plating system workpiece support having workpiece engaging electrode | Martin Bleck, Lyndon Graham | 2003-12-16 |
| 6660137 | System for electrochemically processing a workpiece | Gregory J. Wilson, Paul R. McHugh | 2003-12-09 |
| 6654122 | Semiconductor processing apparatus having lift and tilt mechanism | Mark Dix, Vladimir Zila, Daniel J. Woodruff | 2003-11-25 |
| 6645356 | Methods and apparatus for processing the surface of a microelectronic workpiece | Daniel J. Woodruff, Thomas H. Oberlitner, Linlin Chen, John M. Pedersen, Vladimir Zila | 2003-11-11 |
| 6645355 | Semiconductor processing apparatus having lift and tilt mechanism | Mark Dix, Vlad Zila, Daniel J. Woodruff | 2003-11-11 |
| 6569297 | Workpiece processor having processing chamber with improved processing fluid flow | Gregory J. Wilson, Paul R. McHugh | 2003-05-27 |
| 6547937 | Microelectronic workpiece processing tool including a processing reactor having a paddle assembly for agitation of a processing fluid proximate to the workpiece | Thomas H. Oberlitner | 2003-04-15 |
| 6527926 | Electroplating reactor including back-side electrical contact apparatus | Daniel J. Woodruff, Robert W. Batz, Jr., James T. Kuechmann | 2003-03-04 |