Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6654122 | Semiconductor processing apparatus having lift and tilt mechanism | Kyle M. Hanson, Vladimir Zila, Daniel J. Woodruff | 2003-11-25 |
| 6645355 | Semiconductor processing apparatus having lift and tilt mechanism | Kyle M. Hanson, Vlad Zila, Daniel J. Woodruff | 2003-11-11 |