Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6654122 | Semiconductor processing apparatus having lift and tilt mechanism | Kyle M. Hanson, Mark Dix, Vladimir Zila | 2003-11-25 |
| 6645355 | Semiconductor processing apparatus having lift and tilt mechanism | Kyle M. Hanson, Mark Dix, Vlad Zila | 2003-11-11 |
| 6645356 | Methods and apparatus for processing the surface of a microelectronic workpiece | Kyle M. Hanson, Thomas H. Oberlitner, Linlin Chen, John M. Pedersen, Vladimir Zila | 2003-11-11 |
| 6623609 | Lift and rotate assembly for use in a workpiece processing station and a method of attaching the same | Randy Harris | 2003-09-23 |
| 6527926 | Electroplating reactor including back-side electrical contact apparatus | Kyle M. Hanson, Robert W. Batz, Jr., James T. Kuechmann | 2003-03-04 |