Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6654122 | Semiconductor processing apparatus having lift and tilt mechanism | Kyle M. Hanson, Mark Dix, Daniel J. Woodruff | 2003-11-25 |
| 6645356 | Methods and apparatus for processing the surface of a microelectronic workpiece | Daniel J. Woodruff, Kyle M. Hanson, Thomas H. Oberlitner, Linlin Chen, John M. Pedersen | 2003-11-11 |