Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660137 | System for electrochemically processing a workpiece | Paul R. McHugh, Kyle M. Hanson | 2003-12-09 |
| 6569297 | Workpiece processor having processing chamber with improved processing fluid flow | Paul R. McHugh, Kyle M. Hanson | 2003-05-27 |
| 6565729 | Method for electrochemically depositing metal on a semiconductor workpiece | Linlin Chen, Paul R. McHugh, Robert A. Weaver, Thomas Ritzdorf | 2003-05-20 |