Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6669834 | Method for high deposition rate solder electroplating on a microelectronic workpiece | Robert W. Batz, Jr., Scot Conrady | 2003-12-30 |
| 6599412 | In-situ cleaning processes for semiconductor electroplating electrodes | Lyndon Graham, Jeffrey I. Turner | 2003-07-29 |
| 6592736 | Methods and apparatus for controlling an amount of a chemical constituent of an electrochemical bath | Dakin Fulton | 2003-07-15 |
| 6565729 | Method for electrochemically depositing metal on a semiconductor workpiece | Linlin Chen, Gregory J. Wilson, Paul R. McHugh, Robert A. Weaver | 2003-05-20 |
| 6551479 | Apparatus for controlling and/or measuring additive concentration in an electroplating bath | Lyndon Graham, Thomas C. Taylor, Fredrick A. Lindberg, Bradley C. Carpenter | 2003-04-22 |
| 6508920 | Apparatus for low-temperature annealing of metallization microstructures in the production of a microelectronic device | E. Henry Stevens, Linlin Chen, Lyndon Graham, Curt Dundas | 2003-01-21 |