Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6638410 | Apparatus and method for electrolytically depositing copper on a semiconductor workpiece | Linlin Chen | 2003-10-28 |
| 6551479 | Apparatus for controlling and/or measuring additive concentration in an electroplating bath | Lyndon Graham, Thomas Ritzdorf, Fredrick A. Lindberg, Bradley C. Carpenter | 2003-04-22 |