Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6663762 | Plating system workpiece support having workpiece engaging electrode | Martin Bleck, Kyle M. Hanson | 2003-12-16 |
| 6599412 | In-situ cleaning processes for semiconductor electroplating electrodes | Thomas Ritzdorf, Jeffrey I. Turner | 2003-07-29 |
| 6551479 | Apparatus for controlling and/or measuring additive concentration in an electroplating bath | Thomas C. Taylor, Thomas Ritzdorf, Fredrick A. Lindberg, Bradley C. Carpenter | 2003-04-22 |
| 6508920 | Apparatus for low-temperature annealing of metallization microstructures in the production of a microelectronic device | Thomas Ritzdorf, E. Henry Stevens, Linlin Chen, Curt Dundas | 2003-01-21 |