Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664197 | Process for etching thin-film layers of a workpiece used to form microelectronic circuits or components | Richard Pfeiffer | 2003-12-16 |
| 6508920 | Apparatus for low-temperature annealing of metallization microstructures in the production of a microelectronic device | Thomas Ritzdorf, Linlin Chen, Lyndon Graham, Curt Dundas | 2003-01-21 |