Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6671051 | Apparatus and methods for detecting killer particles during chemical mechanical polishing | Anantha R. Sethuraman, Guoheng Zhao | 2003-12-30 |
| 6636302 | Scanning system for inspecting anamolies on surfaces | Stanley Stokowski | 2003-10-21 |
| 6633831 | Methods and systems for determining a critical dimension and a thin film characteristic of a specimen | Ady Levy, Kyle Brown, Gary Bultman, Dan Wack, John Fielden | 2003-10-14 |
| 6628397 | Apparatus and methods for performing self-clearing optical measurements | Shing Lee, Kalman Kele, Guoheng Zhao, Kurt Lehman | 2003-09-30 |
| 6611330 | System for measuring polarimetric spectrum and other properties of a sample | Shing Lee, Haiming Wang, Adam E. Norton | 2003-08-26 |
| 6552803 | Detection of film thickness through induced acoustic pulse-echos | Haiming Wang, Shing Lee | 2003-04-22 |