Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6671051 | Apparatus and methods for detecting killer particles during chemical mechanical polishing | Mehrdad Nikoonahad, Guoheng Zhao | 2003-12-30 |
| 6566249 | Planarized semiconductor interconnect topography and method for polishing a metal layer to form wide interconnect structures | William W. C. Koutny, Jr., Christopher A. Seams | 2003-05-20 |