Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6566249 | Planarized semiconductor interconnect topography and method for polishing a metal layer to form wide interconnect structures | William W. C. Koutny, Jr., Anantha R. Sethuraman | 2003-05-20 |