Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6671051 | Apparatus and methods for detecting killer particles during chemical mechanical polishing | Mehrdad Nikoonahad, Anantha R. Sethuraman | 2003-12-30 |
| 6657715 | Sample inspection system | Mehdi Vaez-Iravani, Stanley Stokowski | 2003-12-02 |
| 6639662 | Sample inspection system | Mehdi Vaez-Iravani, Stanley Stokowski | 2003-10-28 |
| 6628397 | Apparatus and methods for performing self-clearing optical measurements | Mehrdad Nikoonahad, Shing Lee, Kalman Kele, Kurt Lehman | 2003-09-30 |
| 6618134 | Sample inspection system | Mehdi Vaez-Iravani, Stanley Stokowski | 2003-09-09 |
| 6608676 | System for detecting anomalies and/or features of a surface | Stanley Stokowski, Mehdi Vaez-Iravani | 2003-08-19 |