Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6647032 | Thermally wavelength tunable laser having selectively activated gratings | David A. G. Deacon | 2003-11-11 |
| 6628397 | Apparatus and methods for performing self-clearing optical measurements | Mehrdad Nikoonahad, Kalman Kele, Guoheng Zhao, Kurt Lehman | 2003-09-30 |
| 6621264 | In-situ metalization monitoring using eddy current measurements during the process for removing the film | Kurt Lehman, Walter H. Johnson, John Fielden | 2003-09-16 |
| 6611330 | System for measuring polarimetric spectrum and other properties of a sample | Haiming Wang, Adam E. Norton, Mehrdad Nikoonahad | 2003-08-26 |
| 6552803 | Detection of film thickness through induced acoustic pulse-echos | Haiming Wang, Mehrdad Nikoonahad | 2003-04-22 |
| 6514775 | In-situ end point detection for semiconductor wafer polishing | Haiguang Chen | 2003-02-04 |