Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6633831 | Methods and systems for determining a critical dimension and a thin film characteristic of a specimen | Mehrdad Nikoonahad, Ady Levy, Kyle Brown, Gary Bultman, Dan Wack | 2003-10-14 |
| 6621264 | In-situ metalization monitoring using eddy current measurements during the process for removing the film | Kurt Lehman, Shing Lee, Walter H. Johnson | 2003-09-16 |