Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6633831 | Methods and systems for determining a critical dimension and a thin film characteristic of a specimen | Mehrdad Nikoonahad, Ady Levy, Gary Bultman, Dan Wack, John Fielden | 2003-10-14 |
| 6551174 | Supplying slurry to a polishing pad in a chemical mechanical polishing system | Brian J. Brown | 2003-04-22 |