Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6633831 | Methods and systems for determining a critical dimension and a thin film characteristic of a specimen | Mehrdad Nikoonahad, Kyle Brown, Gary Bultman, Dan Wack, John Fielden | 2003-10-14 |