Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6628397 | Apparatus and methods for performing self-clearing optical measurements | Mehrdad Nikoonahad, Shing Lee, Kalman Kele, Guoheng Zhao | 2003-09-30 |
| 6621264 | In-situ metalization monitoring using eddy current measurements during the process for removing the film | Shing Lee, Walter H. Johnson, John Fielden | 2003-09-16 |