Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667805 | Small-spot spectrometry instrument with reduced polarization | Kenneth C. Johnson, Fred E. Stanke | 2003-12-23 |
| 6611330 | System for measuring polarimetric spectrum and other properties of a sample | Shing Lee, Haiming Wang, Mehrdad Nikoonahad | 2003-08-26 |
| 6583877 | Spectroscopic measurement system using an off-axis spherical mirror and refractive elements | — | 2003-06-24 |
| 6572456 | Bathless wafer measurement apparatus and method | Michael Weber-Grabau, Ivelin A. Anguelov, Edric Tong, Fred E. Stanke, Badru D. Hyatt | 2003-06-03 |