Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667805 | Small-spot spectrometry instrument with reduced polarization | Adam E. Norton, Kenneth C. Johnson | 2003-12-23 |
| 6623991 | Method of measuring meso-scale structures on wafers | Kenneth C. Johnson | 2003-09-23 |
| 6572456 | Bathless wafer measurement apparatus and method | Michael Weber-Grabau, Ivelin A. Anguelov, Edric Tong, Adam E. Norton, Badru D. Hyatt | 2003-06-03 |
| 6563586 | Wafer metrology apparatus and method | Clinton Carlisle, Hung Pham, Edric Tong, Douglas E. Ruth, James Cahill +2 more | 2003-05-13 |
| 6510395 | Method of detecting residue on a polished wafer | — | 2003-01-21 |