Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6572456 | Bathless wafer measurement apparatus and method | Michael Weber-Grabau, Ivelin A. Anguelov, Adam E. Norton, Fred E. Stanke, Badru D. Hyatt | 2003-06-03 |
| 6563586 | Wafer metrology apparatus and method | Fred E. Stanke, Clinton Carlisle, Hung Pham, Douglas E. Ruth, James Cahill +2 more | 2003-05-13 |