Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667805 | Small-spot spectrometry instrument with reduced polarization | Adam E. Norton, Fred E. Stanke | 2003-12-23 |
| 6628390 | Wafer alignment sensor using a phase-shifted microlens array | — | 2003-09-30 |
| 6623991 | Method of measuring meso-scale structures on wafers | Fred E. Stanke | 2003-09-23 |