Haiguang Chen

KL Kla-Tencor: 1 patents #3 of 42Top 8%

📍 Mountain View, CA: #254 of 696 inventorsTop 40%

🗺 California: #8,996 of 28,521 inventorsTop 35%

Overall (2003): #217,332 of 273,478Top 80%

Patents 2003

Issued Patents 2003

Showing 1–1 of 1 patents

Patent #	Title	Co-Inventors	Date
6514775	In-situ end point detection for semiconductor wafer polishing	Shing Lee	2003-02-04